%A A. Bhattacharya
%A C.J.W. Breward
%A M. Gratton
%A J. Evans
%A M. Nicholas
%A C. Please
%A D. Schwendeman
%A M. Surles
%A T. Witelski
%L miis73
%T Lubrication Layer Perturbations in Chemical-Mechanical Polishing
%D 2005